JPH0472926U - - Google Patents

Info

Publication number
JPH0472926U
JPH0472926U JP11600590U JP11600590U JPH0472926U JP H0472926 U JPH0472926 U JP H0472926U JP 11600590 U JP11600590 U JP 11600590U JP 11600590 U JP11600590 U JP 11600590U JP H0472926 U JPH0472926 U JP H0472926U
Authority
JP
Japan
Prior art keywords
magnetic levitation
floating object
transport device
levitation transport
travels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11600590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11600590U priority Critical patent/JPH0472926U/ja
Publication of JPH0472926U publication Critical patent/JPH0472926U/ja
Pending legal-status Critical Current

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Landscapes

  • Non-Mechanical Conveyors (AREA)
JP11600590U 1990-11-05 1990-11-05 Pending JPH0472926U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11600590U JPH0472926U (en]) 1990-11-05 1990-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11600590U JPH0472926U (en]) 1990-11-05 1990-11-05

Publications (1)

Publication Number Publication Date
JPH0472926U true JPH0472926U (en]) 1992-06-26

Family

ID=31863816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11600590U Pending JPH0472926U (en]) 1990-11-05 1990-11-05

Country Status (1)

Country Link
JP (1) JPH0472926U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288808A (ja) * 1987-05-22 1988-11-25 Hitachi Ltd 搬送装置
JPH0199404A (ja) * 1987-10-12 1989-04-18 Ulvac Corp 真空中に於ける磁気浮上式交差搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288808A (ja) * 1987-05-22 1988-11-25 Hitachi Ltd 搬送装置
JPH0199404A (ja) * 1987-10-12 1989-04-18 Ulvac Corp 真空中に於ける磁気浮上式交差搬送装置

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